Picture of Plasma Asher
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Responsibles
1st Responsible:
Mikael Evander
2nd Responsible:
Martin Bengtsson
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Description
There seem to be problems keeping the plasma chamber clean and that the residues of the elastomers used in the oven are very hard to remove. Have this in mind when you use it as it might create problems and deposit material on your wafers.

  • Before entering the clean room, turn on the oxygen bottle to the left of the clean room entrance
  • Press the power button to start both the vaccuum pump and the plasma cleaner
  • Press vent to vent the chamber. The process takes around 10s.
  • Insert your sample in the chamber and close the door. Make sure that the sample is fairly clean so you don't contaminate the chamber.
  • Press vent again to close the chamber and press pump to start pumping the vaccuum.
  • When the timer display lights up, press the gas button to start the oxygen flow.
  • Set the flow rate using the needle valve. Start of with a high flow rate, 8-10, leave the system for a minute or two and then lower the flow rate to 1-2.
  • Let the vaccuum pump establish an equilibrium between the gas inflow and the vaccuum pumping. This should take a couple of minutes.
  • Set the desired plasma cleaning time on the display and adjust the power knob to choose a power level between 0 and 100%.
  • Check the flow rate, it should now read somewhere between 5 and 10. If not, adjust it with the needle valve.
  • Press Generator to start the plasma process. The process will stop automatically when the timer stops.
  • Press vent to ventilate the chamber and remove your sample.
  • Deselect vent and press pump to pump a new vaccuum.
  • When the display lights up, turn off the power.
  • Turn off the oxygen when you exit the clean room!

 

Details
Tool name:
Plasma Asher
Area/room:
E:1332 Renrum
Category:
ELMÄT
Manufacturer:
Diener
Model:
FEMTO SN80044
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